Ergonomics in Semiconductor Wafer Manufacturing
نویسندگان
چکیده
منابع مشابه
Control in Semiconductor Wafer Manufacturing
A semiconductor wafer undergoes a wide range of processes before it is transformed from a bare silicon wafer to one populated with millions of transistor circuits. Such processes include Physical or Chemical Vapor Deposition, (PVD, CVD), Chemical-Mechanical Planarization (CMP), Plasma Etch, Rapid Thermal Processing (RTP), and photolithography. As feature sizes keep shrinking, process control pl...
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ژورنال
عنوان ژورنال: Advanced Engineering Forum
سال: 2013
ISSN: 2234-991X
DOI: 10.4028/www.scientific.net/aef.10.231